An MEMS Optical Fiber Pressure Sensor
Based on a Square Silicon Diaphragm: Numerical Simulation and Experimental
Verification
aCollege of Physics Science and Technology, Shenzhen University, Shenzhen
518060, China
bShenzhen Key Lab of Sensors Technology, Shenzhen 518060, China
1Email: lixuejin@szu.edu.cn
cCollege of Electronic Engineering, Heilongjiang University, Harbin 150080,
China
Cite as: Xue-Jin Li, Cheng-Jun Qiu, Yuan-Long Deng, Wei Qu. An MEMS Optical Fiber Pressure Sensor
Based on a Square Silicon Diaphragm: Numerical Simulation and Experimental
Verification, nano Online. (2016). DOI: https://doi.org/10.1515/nano.0023.00025
Cite as: Xue-Jin Li, Cheng-Jun Qiu, Yuan-Long Deng, Wei Qu. An MEMS Optical Fiber Pressure Sensor
Based on a Square Silicon Diaphragm: Numerical Simulation and Experimental
Verification, International Journal of Nonlinear Sciences and Numerical Simulation. 11, 225 (2010). DOI: https://doi.org/10.1515/IJNSNS.2010.11.3.225
Abstract
A simple MEMS optical fiber pressure sensor
with the Fabry–Perot interferometer configuration is constructed that is based on a
square silicon diaphragm and the intensity demodulation technology. A large area ratio
of the moving mirror to the stationary one is employed to minimize the non-planarity of
the deflection, and a reference light generated by a 2 × 2 optical fiber coupler is used
to reduce the errors that are produced by the intensity variations of the light source.
The theoretical analysis, simulation and experimental results all show that the pressure
sensor has reasonable sensitivity, stability and measurement range. With a low cost and
simple fabrication process, this sensor has great potentials for mass production and
commercialization.
Keywords: Optical fiber sensor; MEMS; Fabry–Perot interferometry; intensity demodulation; square diaphragm
