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Li, X., Qiu, C., Deng, Y., et al. An MEMS Optical Fiber Pressure Sensor Based on a Square Silicon Diaphragm: Numerical Simulation and Experimental Verification. In nano Online (n.d.). Berlin, Boston: De Gruyter. Retrieved 23 Jan. 2021, from https://db.degruyter.com/view/NANO/nano.0023.00025