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The one-stop-shop for nano science.
nano Online
Physics, Chemistry and Materials Science at the Nanoscale
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An accurate nonlinear stochastic model for MEMS-based inertial sensor error with wavelet networks
This result set contains:
El-Diasty, Mohammed; El-Rabbany, Ahmed; Pagiatakis, Spiros
2007
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An MEMS Optical Fiber Pressure Sensor Based on a Square Silicon Diaphragm: Numerical Simulation and Experimental Verification
This result set contains:
Li, Xue-Jin; Qiu, Cheng-Jun; Deng, Yuan-Long; Qu, Wei; He, Jun-Nan
2010
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Analysis of Residual Stress Gradient in MEMS Multi-layer Structure
This result set contains:
Qian, Jin; Zhao, Ya-Pu; Zhu, Ru-Zeng; Yu, Tong-Xi
2002
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Annealing Effect on the Adhesion of Stacked Films for MEMS
This result set contains:
Chung, Chen-Kuei; Ou, Jeng-Long; Wu, Luh-Huew; Lee, Tzong-Sheng
2002
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Aufbau und Betrieb eines Infrarot-Mikrospektrometers auf der Basis eines MEMS-FP-Filters
This result set contains:
Ebermann, Martin; Neumann, Norbert
2010
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Biocompatibility evaluation of MEMS packaging materials for implantable devices
This result set contains:
Baum, M.; Haubold, M.; Besser, J.; Wiemer, M.; Gessner, T.
2013
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A comprehensive review on convex and concave corners in silicon bulk micromachining based on anisotropic wet chemical etching
This result set contains:
Pal, Prem; Sato, Kazuo
2015
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Open Access
Designing Thermally Actuated Bimorph as Energy Harvester
This result set contains:
Bhuyan, Satyam
2019
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Determining a free flight performance surface by mathematical optimization techniques utilizing an air speed indicator, MEMS inertial sensors and a variometer
This result set contains:
Teskey, Wesley J. E.; Chow, Jacky C. K.
2010
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Fabrication and Characterization of Nickel Titanium Shape memory Thin Films by RF Magnetron Sputtering for MEMS Applications
This result set contains:
Gong, F. F.; Sun, Q. P.
2002
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3.237.205.144