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AlGaN/GaN MISHEMTs with AlN gate dielectric grown by thermal ALD techniqueThis result set contains:

Liu, Xiao-Yong; Zhao, Sheng-Xun; Zhang, Lin-Qing; Huang, Hong-Fan; Shi, Jin-Shan; et al.
2015

Transparent and flexible capacitors based on nanolaminate Al2O3/TiO2/Al2O3 This result set contains:

Zhang, Guozhen; Wu, Hao; Chen, Chao; Wang, Ti; Yue, Jin; et al.
2015