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Characterization and mitigation of 3D mask effects in extreme ultraviolet lithographyThis result set contains:

Erdmann, Andreas; Xu, Dongbo; Evanschitzky, Peter; Philipsen, Vicky; Luong, Vu; et al.
2017

Electrospray deposition of organic molecules on bulk insulator surfacesThis result set contains:

Hinaut, Antoine; Pawlak, Rémy; Meyer, Ernst; Glatzel, Thilo
2015

A full-process chain assessment for nanoimprint technology on 200-mm industrial platformThis result set contains:

Teyssedre, Hubert; Landis, Stefan; Thanner, Christine; Laure, Maria; Khan, Jonas; et al.
2017

Light sources for high-volume manufacturing EUV lithography: technology, performance, and power scalingThis result set contains:

Fomenkov, Igor; Brandt, David; Ershov, Alex; Schafgans, Alexander; Tao, Yezheng; et al.
2017

Next-generation lithography – an outlook on EUV projection and nanoimprintThis result set contains:

Schoot, Jan van; Schift, Helmut
2017

Photoresists in extreme ultraviolet lithography (EUVL)This result set contains:

De Simone, Danilo; Vesters, Yannick; Vandenberghe, Geert
2017